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Patterned crack-free PZT thick films for micro-electromechanical system applications

Dauchy, F and Dorey, RA (2007) Patterned crack-free PZT thick films for micro-electromechanical system applications INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 33 (1-2). pp. 86-94.

Full text not available from this repository.
Item Type: Article
Authors :
NameEmailORCID
Dauchy, FUNSPECIFIEDUNSPECIFIED
Dorey, RAr.dorey@surrey.ac.ukUNSPECIFIED
Date : 1 January 2007
Identification Number : https://doi.org/10.1007/s00170-007-0968-1
Uncontrolled Keywords : Science & Technology, Technology, Automation & Control Systems, Engineering, Manufacturing, Engineering, AUTOMATION & CONTROL SYSTEMS, ENGINEERING, MANUFACTURING, sol gel, thick film, MEMS, multilayer
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:12
Last Modified : 17 May 2017 15:09
URI: http://epubs.surrey.ac.uk/id/eprint/838309

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