Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution

Marson, S, Dorey, RA, Zhang, Q and Whatmore, RW (2003) Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution In: 15th International Symposium on Integrated Ferroelectrics, 2003-03-09 - 2003-03-12, COLORADO SPRINGS, COLORADO.

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Item Type:	Conference or Workshop Item (UNSPECIFIED)
Divisions :	Surrey research (other units)
Authors :	Name Email ORCID Marson, S Dorey, RA r.dorey@surrey.ac.uk Zhang, Q Whatmore, RW
Date :	1 January 2003
DOI :	10.1080/10584580390259001
Contributors :	Contribution Name Email ORCID publisher TAYLOR & FRANCIS LTD,
Uncontrolled Keywords :	Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Physics, Applied, Physics, Condensed Matter, Engineering, Physics, ENGINEERING, ELECTRICAL & ELECTRONIC, PHYSICS, APPLIED, PHYSICS, CONDENSED MATTER, FILMS, FABRICATION
Related URLs :	Author
Depositing User :	Symplectic Elements
Date Deposited :	17 May 2017 13:12
Last Modified :	23 Jan 2020 18:23
URI:	http://epubs.surrey.ac.uk/id/eprint/838308

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