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Integrating functional ceramics into microsystems

Dorey, RA, Rocks, SA, Dauchy, F, Wang, D, Bortolani, F and Hugo, E (2008) Integrating functional ceramics into microsystems JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 28 (7). pp. 1397-1403.

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Item Type: Article
Authors :
NameEmailORCID
Dorey, RAr.dorey@surrey.ac.ukUNSPECIFIED
Rocks, SAUNSPECIFIEDUNSPECIFIED
Dauchy, FUNSPECIFIEDUNSPECIFIED
Wang, DUNSPECIFIEDUNSPECIFIED
Bortolani, FUNSPECIFIEDUNSPECIFIED
Hugo, EUNSPECIFIEDUNSPECIFIED
Date : 1 January 2008
Identification Number : https://doi.org/10.1016/j.jeurceramsoc.2007.12.003
Uncontrolled Keywords : Science & Technology, Technology, Materials Science, Ceramics, Materials Science, MATERIALS SCIENCE, CERAMICS, films, shaping, sol-gel processes, PZT, functional applications, COMPOSITE THICK-FILMS, DIRECT-WRITE FABRICATION, PIEZOELECTRIC PROPERTIES, PZT CERAMICS, SILICON, SYSTEMS, MEMS
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:11
Last Modified : 17 May 2017 15:09
URI: http://epubs.surrey.ac.uk/id/eprint/838306

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