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Ferroelectric thin and thick films for microsystems

Whatmore, RW, Zhang, Q, Huang, Z and Dorey, RA (2002) Ferroelectric thin and thick films for microsystems In: Symposium on Advanced Materials for Microelectronics held at the Spring Meeting of the E-MRS, 2002-06-18 - 2002-06-21, STRASBOURG, FRANCE.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
Whatmore, RWUNSPECIFIEDUNSPECIFIED
Zhang, QUNSPECIFIEDUNSPECIFIED
Huang, ZUNSPECIFIEDUNSPECIFIED
Dorey, RAr.dorey@surrey.ac.ukUNSPECIFIED
Date : 1 April 2002
Identification Number : 10.1016/S1369-8001(02)00085-9
Contributors :
ContributionNameEmailORCID
publisherELSEVIER SCI LTD, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Materials Science, Multidisciplinary, Physics, Applied, Physics, Condensed Matter, Engineering, Materials Science, Physics, ENGINEERING, ELECTRICAL & ELECTRONIC, MATERIALS SCIENCE, MULTIDISCIPLINARY, PHYSICS, APPLIED, PHYSICS, CONDENSED MATTER, ferroelectrics, thin films, thick films, pyroelectricity, piezoelectricity MEMS, microsystems, LEAD-ZIRCONATE-TITANATE, SOL-GEL PROCESS, PIEZOELECTRIC PROPERTIES, PARTICLE GROWTH, PZT, CRYSTALLIZATION, COMPOSITE, OPTIMIZATION, PHASE
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:11
Last Modified : 17 May 2017 15:09
URI: http://epubs.surrey.ac.uk/id/eprint/838293

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