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Patterned high frequency thick film MEMS transducer

Dauchy, FM and Dorey, RA (2007) Patterned high frequency thick film MEMS transducer In: 18th International Symposium on Integrated Ferroelectrics, 2006-04-23 - 2006-04-27, Honolulu, HI.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
Dauchy, FMUNSPECIFIEDUNSPECIFIED
Dorey, RAr.dorey@surrey.ac.ukUNSPECIFIED
Date : 1 January 2007
Identification Number : https://doi.org/10.1080/10584580601099108
Contributors :
ContributionNameEmailORCID
publisherTAYLOR & FRANCIS LTD, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Physics, Applied, Physics, Condensed Matter, Engineering, Physics, ENGINEERING, ELECTRICAL & ELECTRONIC, PHYSICS, APPLIED, PHYSICS, CONDENSED MATTER, high frequency, piezoelectricity, MEMS, transducers, PZT, thick film
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:11
Last Modified : 17 May 2017 15:09
URI: http://epubs.surrey.ac.uk/id/eprint/838287

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