Piezoelectric PZT films for MEMS and their characterization by interferometry
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Huang, Z, Zhang, Q, Corkovic, S, Dorey, RA, Duval, F, Leighton, G, Wright, R, Kirby, P and Whatmore, RW (2006) Piezoelectric PZT films for MEMS and their characterization by interferometry In: 2nd International Conference on Electroceramics (ICE-2005), 2005-06-12 - 2005-06-16, Seoul, SOUTH KOREA.
Full text not available from this repository.| Item Type: | Conference or Workshop Item (UNSPECIFIED) | ||||||||||||||||||||||||||||||
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| Date : | 1 December 2006 | ||||||||||||||||||||||||||||||
| DOI : | 10.1007/s10832-006-6707-4 | ||||||||||||||||||||||||||||||
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| Uncontrolled Keywords : | Science & Technology, Technology, Materials Science, Ceramics, Materials Science, MATERIALS SCIENCE, CERAMICS, PZT, piezoelectric coefficients, interferometer, laser scanning vibrometer, sol-gel, THIN-FILMS, ELECTROSTRICTIVE STRAINS, LASER INTERFEROMETER, COEFFICIENT, CERAMICS | ||||||||||||||||||||||||||||||
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| Depositing User : | Symplectic Elements | ||||||||||||||||||||||||||||||
| Date Deposited : | 17 May 2017 13:11 | ||||||||||||||||||||||||||||||
| Last Modified : | 16 Jan 2019 18:41 | ||||||||||||||||||||||||||||||
| URI: | http://epubs.surrey.ac.uk/id/eprint/838273 |
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