University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Piezoelectric PZT films for MEMS and their characterization by interferometry

Huang, Z, Zhang, Q, Corkovic, S, Dorey, RA, Duval, F, Leighton, G, Wright, R, Kirby, P and Whatmore, RW (2006) Piezoelectric PZT films for MEMS and their characterization by interferometry In: 2nd International Conference on Electroceramics (ICE-2005), 2005-06-12 - 2005-06-16, Seoul, SOUTH KOREA.

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
Huang, ZUNSPECIFIEDUNSPECIFIED
Zhang, QUNSPECIFIEDUNSPECIFIED
Corkovic, SUNSPECIFIEDUNSPECIFIED
Dorey, RAr.dorey@surrey.ac.ukUNSPECIFIED
Duval, FUNSPECIFIEDUNSPECIFIED
Leighton, GUNSPECIFIEDUNSPECIFIED
Wright, RUNSPECIFIEDUNSPECIFIED
Kirby, PUNSPECIFIEDUNSPECIFIED
Whatmore, RWUNSPECIFIEDUNSPECIFIED
Date : 1 December 2006
Identification Number : https://doi.org/10.1007/s10832-006-6707-4
Contributors :
ContributionNameEmailORCID
publisherSPRINGER, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Technology, Materials Science, Ceramics, Materials Science, MATERIALS SCIENCE, CERAMICS, PZT, piezoelectric coefficients, interferometer, laser scanning vibrometer, sol-gel, THIN-FILMS, ELECTROSTRICTIVE STRAINS, LASER INTERFEROMETER, COEFFICIENT, CERAMICS
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:11
Last Modified : 17 May 2017 15:09
URI: http://epubs.surrey.ac.uk/id/eprint/838273

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year


Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800