Piezoelectric PZT films for MEMS and their characterization by interferometry

Huang, Z, Zhang, Q, Corkovic, S, Dorey, RA, Duval, F, Leighton, G, Wright, R, Kirby, P and Whatmore, RW (2006) Piezoelectric PZT films for MEMS and their characterization by interferometry In: 2nd International Conference on Electroceramics (ICE-2005), 2005-06-12 - 2005-06-16, Seoul, SOUTH KOREA.

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Item Type:	Conference or Workshop Item (UNSPECIFIED)
Authors :	Name Email ORCID Huang, Z UNSPECIFIED UNSPECIFIED Zhang, Q UNSPECIFIED UNSPECIFIED Corkovic, S UNSPECIFIED UNSPECIFIED Dorey, RA r.dorey@surrey.ac.uk UNSPECIFIED Duval, F UNSPECIFIED UNSPECIFIED Leighton, G UNSPECIFIED UNSPECIFIED Wright, R UNSPECIFIED UNSPECIFIED Kirby, P UNSPECIFIED UNSPECIFIED Whatmore, RW UNSPECIFIED UNSPECIFIED
Date :	1 December 2006
Identification Number :	https://doi.org/10.1007/s10832-006-6707-4
Contributors :	Contribution Name Email ORCID publisher SPRINGER, UNSPECIFIED UNSPECIFIED
Uncontrolled Keywords :	Science & Technology, Technology, Materials Science, Ceramics, Materials Science, MATERIALS SCIENCE, CERAMICS, PZT, piezoelectric coefficients, interferometer, laser scanning vibrometer, sol-gel, THIN-FILMS, ELECTROSTRICTIVE STRAINS, LASER INTERFEROMETER, COEFFICIENT, CERAMICS
Related URLs :	Author
Depositing User :	Symplectic Elements
Date Deposited :	17 May 2017 13:11
Last Modified :	17 May 2017 15:09
URI:	http://epubs.surrey.ac.uk/id/eprint/838273

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