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Batch encapsulation technique for CMOS based chemical sensors

Prodromakis, T, Georgiou, P, Constandinou, TG, Michelakis, K and Toumazou, C (2008) Batch encapsulation technique for CMOS based chemical sensors 2008 IEEE-BIOCAS Biomedical Circuits and Systems Conference, BIOCAS 2008. pp. 321-324.

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This paper presents a batch encapsulation technique for CMOS based chemical sensors. SU-8 photoresist is employed as the encapsulant while the sensing membrane of the sensor is directly exposed to the solution. This approach is based on standard photolithographic techniques and thus can be used for processing multiple dies containing chemical sensors in a single step. © 2008 IEEE.

Item Type: Article
Divisions : Surrey research (other units)
Authors :
Prodromakis, T
Georgiou, P
Constandinou, TG
Toumazou, C
Date : 1 December 2008
DOI : 10.1109/BIOCAS.2008.4696939
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 12:32
Last Modified : 24 Jan 2020 22:25

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