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Biocompatible encapsulation of CMOS based chemical sensors

Prodromakis, T, Michelakis, K, Zoumpoulidis, T, Dekker, R and Toumazou, C (2009) Biocompatible encapsulation of CMOS based chemical sensors Proceedings of IEEE Sensors. pp. 791-794.

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Abstract

One of the most challenging design aspects of chemical sensors is the isolation of the non-sensitive areas from the sensed medium. This becomes particularly critical in applications where the sensors are part of an implantable platform, restricting the available options to those using biocompatible materials. Parylene has been extensively used to coat pacemakers as it demonstrates excellent chemical, electrical and thermal stability. In this work, we have utilized parylene to encapsulate CMOS-based chemical sensors bonded on a cartridge, while the sensing area has been exposed by laser ablation and sonication. Measured results demonstrate improved electrical isolation than previously reported techniques. ©2009 IEEE.

Item Type: Article
Authors :
NameEmailORCID
Prodromakis, TUNSPECIFIEDUNSPECIFIED
Michelakis, Kk.michelakis@surrey.ac.ukUNSPECIFIED
Zoumpoulidis, TUNSPECIFIEDUNSPECIFIED
Dekker, RUNSPECIFIEDUNSPECIFIED
Toumazou, CUNSPECIFIEDUNSPECIFIED
Date : 1 December 2009
Identification Number : https://doi.org/10.1109/ICSENS.2009.5398537
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 12:32
Last Modified : 17 May 2017 15:04
URI: http://epubs.surrey.ac.uk/id/eprint/835701

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