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Growth mechanisms involved in the synthesis of smooth and microtextured films by acetylene magnetron discharges.

De Vriendt, V, Miladinovic, SM, Colaux, JL, Maseri, F, Wilkins, CL and Lucas, S (2011) Growth mechanisms involved in the synthesis of smooth and microtextured films by acetylene magnetron discharges. Langmuir, 27 (14). pp. 8913-8922.

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Abstract

The growth of hydrogenated amorphous carbons (a-C:H) produced by continuous or pulsed discharges of acetylene (C(2)H(2)) in an unbalanced magnetron setup was investigated. At 5 × 10(-3) Torr, only smooth films are obtained, whereas at 5 × 10(-1) Torr using a pulsed discharge some microtextured films are formed if the duty cycle is low. The morphology of these microtextured films consists of nanoparticles, filamentary particles, and particular agglomerates ("microflowers"). This paper presents a study of acetylene gas phase polymerization by mass spectrometry, and a detailed analysis of bulk structure of films by combining three techniques which include IR spectroscopy, Raman spectroscopy, and laser desorption/ionization Fourier transform mass spectrometry (LDI-FTMS). Finally, based on the study of gas phase and film structure, we propose a model for the growth of both smooth and microtextured films.

Item Type: Article
Authors :
NameEmailORCID
De Vriendt, VUNSPECIFIEDUNSPECIFIED
Miladinovic, SMUNSPECIFIEDUNSPECIFIED
Colaux, JLj.colaux@surrey.ac.ukUNSPECIFIED
Maseri, FUNSPECIFIEDUNSPECIFIED
Wilkins, CLUNSPECIFIEDUNSPECIFIED
Lucas, SUNSPECIFIEDUNSPECIFIED
Date : 19 July 2011
Identification Number : https://doi.org/10.1021/la2003035
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 12:23
Last Modified : 17 May 2017 15:03
URI: http://epubs.surrey.ac.uk/id/eprint/835126

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