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THE USE OF PIXE AND STIM IN MICROELECTRONICS ANALYSIS

BREESE, MBH, GRIME, GW and WATT, F (1993) THE USE OF PIXE AND STIM IN MICROELECTRONICS ANALYSIS In: 6TH INTERNATIONAL CONF ON PIXE ( PARTICLE INDUCED X-RAY EMISSION ) AND ITS ANALYTICAL APPLICATIONS, 1992-07-20 - 1992-07-24, WASADEA UNIV CONF HALL, TOKYO, JAPAN.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
BREESE, MBHUNSPECIFIEDUNSPECIFIED
GRIME, GWg.grime@surrey.ac.ukUNSPECIFIED
WATT, FUNSPECIFIEDUNSPECIFIED
Date : 1 April 1993
Identification Number : https://doi.org/10.1016/0168-583X(93)95672-R
Contributors :
ContributionNameEmailORCID
publisherELSEVIER SCIENCE BV, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, NUCLEAR MICROPROBE, MICROSCOPY, MICROBEAM
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 12:06
Last Modified : 17 May 2017 15:01
URI: http://epubs.surrey.ac.uk/id/eprint/834013

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