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MICROCIRCUIT IMAGING USING AN ION-BEAM-INDUCED CHARGE

BREESE, MBH, KING, PJC, GRIME, GW and WATT, F (1992) MICROCIRCUIT IMAGING USING AN ION-BEAM-INDUCED CHARGE JOURNAL OF APPLIED PHYSICS, 72 (6). pp. 2097-2104.

Full text not available from this repository.
Item Type: Article
Authors :
NameEmailORCID
BREESE, MBHUNSPECIFIEDUNSPECIFIED
KING, PJCUNSPECIFIEDUNSPECIFIED
GRIME, GWg.grime@surrey.ac.ukUNSPECIFIED
WATT, FUNSPECIFIEDUNSPECIFIED
Date : 15 September 1992
Identification Number : 10.1063/1.351596
Uncontrolled Keywords : Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, MICROSCOPY
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 12:04
Last Modified : 17 May 2017 15:01
URI: http://epubs.surrey.ac.uk/id/eprint/833901

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