Rapid deep micromachining of polytetrafluoroethylene by MeV icon bombardment in oxygen-rich atmospheres
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Gomez-Morilla, I, Sofield, CJ, Grime, GW and Gwilliam, R (2005) Rapid deep micromachining of polytetrafluoroethylene by MeV icon bombardment in oxygen-rich atmospheres JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 15 (4). pp. 698-701.
Full text not available from this repository.| Item Type: | Article | |||||||||||||||
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| Divisions : | Surrey research (other units) | |||||||||||||||
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| Date : | 1 April 2005 | |||||||||||||||
| DOI : | 10.1088/0960-1317/15/4/004 | |||||||||||||||
| Uncontrolled Keywords : | Science & Technology, Technology, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Instruments & Instrumentation, Materials Science, Multidisciplinary, Mechanics, Engineering, Science & Technology - Other Topics, Materials Science, ENGINEERING, ELECTRICAL & ELECTRONIC, INSTRUMENTS & INSTRUMENTATION, MATERIALS SCIENCE, MULTIDISCIPLINARY, MECHANICS, NANOSCIENCE & NANOTECHNOLOGY, ION-BEAM, FACILITY, POLYMERS | |||||||||||||||
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| Depositing User : | Symplectic Elements | |||||||||||||||
| Date Deposited : | 17 May 2017 12:04 | |||||||||||||||
| Last Modified : | 24 Jan 2020 21:39 | |||||||||||||||
| URI: | http://epubs.surrey.ac.uk/id/eprint/833862 |
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