Rapid deep micromachining of polytetrafluoroethylene by MeV icon bombardment in oxygen-rich atmospheres

Gomez-Morilla, I, Sofield, CJ, Grime, GW and Gwilliam, R (2005) Rapid deep micromachining of polytetrafluoroethylene by MeV icon bombardment in oxygen-rich atmospheres JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 15 (4). pp. 698-701.

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Item Type:	Article
Authors :	Name Email ORCID Gomez-Morilla, I UNSPECIFIED UNSPECIFIED Sofield, CJ UNSPECIFIED UNSPECIFIED Grime, GW g.grime@surrey.ac.uk UNSPECIFIED Gwilliam, R UNSPECIFIED UNSPECIFIED
Date :	1 April 2005
Identification Number :	https://doi.org/10.1088/0960-1317/15/4/004
Uncontrolled Keywords :	Science & Technology, Technology, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Instruments & Instrumentation, Materials Science, Multidisciplinary, Mechanics, Engineering, Science & Technology - Other Topics, Materials Science, ENGINEERING, ELECTRICAL & ELECTRONIC, INSTRUMENTS & INSTRUMENTATION, MATERIALS SCIENCE, MULTIDISCIPLINARY, MECHANICS, NANOSCIENCE & NANOTECHNOLOGY, ION-BEAM, FACILITY, POLYMERS
Related URLs :	Author
Depositing User :	Symplectic Elements
Date Deposited :	17 May 2017 12:04
Last Modified :	17 May 2017 15:01
URI:	http://epubs.surrey.ac.uk/id/eprint/833862

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