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DIAMOND-LIKE CARBON THIN-FILM DEPOSITION USING A MAGNETICALLY CONFINED RF PECVD SYSTEM

SILVA, SRP, CLAY, KJ, SPEAKMAN, SP and AMARATUNGA, GAJ (1995) DIAMOND-LIKE CARBON THIN-FILM DEPOSITION USING A MAGNETICALLY CONFINED RF PECVD SYSTEM In: Diamond Films 94, 1994-09-25 - 1994-09-30, IL CIOCCO, ITALY.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
SILVA, SRPs.silva@surrey.ac.ukUNSPECIFIED
CLAY, KJUNSPECIFIEDUNSPECIFIED
SPEAKMAN, SPUNSPECIFIEDUNSPECIFIED
AMARATUNGA, GAJUNSPECIFIEDUNSPECIFIED
Date : 15 May 1995
Identification Number : 10.1016/0925-9635(94)00266-5
Contributors :
ContributionNameEmailORCID
publisherELSEVIER SCIENCE SA LAUSANNE, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Technology, Materials Science, Multidisciplinary, Materials Science, MATERIALS SCIENCE, MULTIDISCIPLINARY, DOPING, DIAMOND-LIKE CARBON, ELECTRICAL PROPERTIES, AMORPHOUS HYDROGENATED CARBON
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:48
Last Modified : 17 May 2017 14:59
URI: http://epubs.surrey.ac.uk/id/eprint/832810

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