DIAMOND-LIKE CARBON THIN-FILM DEPOSITION USING A MAGNETICALLY CONFINED RF PECVD SYSTEM
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SILVA, SRP, CLAY, KJ, SPEAKMAN, SP and AMARATUNGA, GAJ (1995) DIAMOND-LIKE CARBON THIN-FILM DEPOSITION USING A MAGNETICALLY CONFINED RF PECVD SYSTEM In: Diamond Films 94, 1994-09-25 - 1994-09-30, IL CIOCCO, ITALY.
Full text not available from this repository.Item Type: | Conference or Workshop Item (UNSPECIFIED) | |||||||||||||||
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Divisions : | Surrey research (other units) | |||||||||||||||
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Date : | 15 May 1995 | |||||||||||||||
DOI : | 10.1016/0925-9635(94)00266-5 | |||||||||||||||
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Uncontrolled Keywords : | Science & Technology, Technology, Materials Science, Multidisciplinary, Materials Science, MATERIALS SCIENCE, MULTIDISCIPLINARY, DOPING, DIAMOND-LIKE CARBON, ELECTRICAL PROPERTIES, AMORPHOUS HYDROGENATED CARBON | |||||||||||||||
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Depositing User : | Symplectic Elements | |||||||||||||||
Date Deposited : | 17 May 2017 11:48 | |||||||||||||||
Last Modified : | 23 Jan 2020 17:18 | |||||||||||||||
URI: | http://epubs.surrey.ac.uk/id/eprint/832810 |
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