DIAMOND-LIKE CARBON THIN-FILM DEPOSITION USING A MAGNETICALLY CONFINED RF PECVD SYSTEM

SILVA, SRP, CLAY, KJ, SPEAKMAN, SP and AMARATUNGA, GAJ (1995) DIAMOND-LIKE CARBON THIN-FILM DEPOSITION USING A MAGNETICALLY CONFINED RF PECVD SYSTEM In: Diamond Films 94, 1994-09-25 - 1994-09-30, IL CIOCCO, ITALY.

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Item Type:	Conference or Workshop Item (UNSPECIFIED)
Divisions :	Surrey research (other units)
Authors :	Name Email ORCID SILVA, SRP s.silva@surrey.ac.uk CLAY, KJ SPEAKMAN, SP AMARATUNGA, GAJ
Date :	15 May 1995
DOI :	10.1016/0925-9635(94)00266-5
Contributors :	Contribution Name Email ORCID publisher ELSEVIER SCIENCE SA LAUSANNE,
Uncontrolled Keywords :	Science & Technology, Technology, Materials Science, Multidisciplinary, Materials Science, MATERIALS SCIENCE, MULTIDISCIPLINARY, DOPING, DIAMOND-LIKE CARBON, ELECTRICAL PROPERTIES, AMORPHOUS HYDROGENATED CARBON
Related URLs :	Author
Depositing User :	Symplectic Elements
Date Deposited :	17 May 2017 11:48
Last Modified :	23 Jan 2020 17:18
URI:	http://epubs.surrey.ac.uk/id/eprint/832810

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