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TRIBOLOGICAL PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED ON SILICON USING RF PLASMA-ENHANCED CVD

SILVA, SRP, KAPOOR, A and AMARATUNGA, GAJ (1995) TRIBOLOGICAL PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED ON SILICON USING RF PLASMA-ENHANCED CVD SURFACE & COATINGS TECHNOLOGY, 73 (1-2). pp. 132-136.

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Item Type: Article
Authors :
NameEmailORCID
SILVA, SRPs.silva@surrey.ac.ukUNSPECIFIED
KAPOOR, AUNSPECIFIEDUNSPECIFIED
AMARATUNGA, GAJUNSPECIFIEDUNSPECIFIED
Date : 1 July 1995
Identification Number : https://doi.org/10.1016/0257-8972(94)02377-8
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Materials Science, Coatings & Films, Physics, Applied, Materials Science, Physics, MATERIALS SCIENCE, COATINGS & FILMS, PHYSICS, APPLIED, DIAMOND-LIKE CARBON, WEAR, AMORPHOUS CARBON, CHEMICAL VAPOR DEPOSITION, AMORPHOUS-CARBON
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:48
Last Modified : 17 May 2017 14:59
URI: http://epubs.surrey.ac.uk/id/eprint/832809

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