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Nanocrystallites in tetrahedral amorphous carbon films (vol 69, pg 491, 1996)

Silva, SRP, Xu, S, Tay, BX, Tan, HS, Milne, WI and Ravi, S (1996) Nanocrystallites in tetrahedral amorphous carbon films (vol 69, pg 491, 1996) APPLIED PHYSICS LETTERS, 69 (4). pp. 491-493.

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Abstract

The microstructure of filtered cathodic vacuum arc deposited tetrahedral amorphous carbon films is studied as a function of ion energy. An optimum energy window in the density and C–C  sp 3 content at an ion energy of ∼90 eV observed in this study. It is shown that the density of the amorphous carbon films are closely related to the sp 3 content. The observation of nanocrystals embedded in the amorphous carbon matrix is reported. Most of the crystals observed by transmission electron microscopy can be indexed to graphite, but some of the crystals can be indexed to cubic diamond. The chemical composition of the crystals is analyzed using electron energy loss spectroscopy (EELS). The only discernible EELS edge is that of C at an energy of 285 eV.

Item Type: Article
Authors :
NameEmailORCID
Silva, SRPs.silva@surrey.ac.ukUNSPECIFIED
Xu, SUNSPECIFIEDUNSPECIFIED
Tay, BXUNSPECIFIEDUNSPECIFIED
Tan, HSUNSPECIFIEDUNSPECIFIED
Milne, WIUNSPECIFIEDUNSPECIFIED
Ravi, SUNSPECIFIEDUNSPECIFIED
Date : 17 May 1996
Identification Number : https://doi.org/10.1063/1.117763
Uncontrolled Keywords : Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:48
Last Modified : 17 May 2017 14:59
URI: http://epubs.surrey.ac.uk/id/eprint/832799

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