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Dopant mapping and strain analysis in B doped silicon structures using micro-Raman spectroscopy

Bowden, M, Gardiner, DJ, Lourenco, MA, Hedley, J, Wood, D, Burdess, JS and Harris, AJ (1998) Dopant mapping and strain analysis in B doped silicon structures using micro-Raman spectroscopy In: Symposium on Microelectromechanical Structures for Materials Research, 1998-04-15 - 1998-04-16, SAN FRANCISCO, CA.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
Bowden, M
Gardiner, DJ
Lourenco, MAm.lourenco@surrey.ac.uk
Hedley, J
Wood, D
Burdess, JS
Harris, AJ
Date : 1 January 1998
Contributors :
ContributionNameEmailORCID
Brown, S
Gilbert, J
Guckel, H
Howe, R
Johnson, G
Krulevitch, P
Muhlstein, C
publisherMATERIALS RESEARCH SOCIETY,
Uncontrolled Keywords : Science & Technology, Technology, Engineering, Electrical & Electronic, Materials Science, Multidisciplinary, Metallurgy & Metallurgical Engineering, Materials Science, Characterization & Testing, Engineering, Materials Science
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:44
Last Modified : 17 May 2017 14:58
URI: http://epubs.surrey.ac.uk/id/eprint/832508

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