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An improved gallium liquid metal ion source geometry for nanotechnology

Van Es, JJ, Gierak, J, Forbes, RG, Suvorov, VG, Van den Berghe, T, Dubuisson, P, Monnet, I and Septier, A (2004) An improved gallium liquid metal ion source geometry for nanotechnology MICROELECTRONIC ENGINEERING, 73-4. pp. 132-138.

Full text not available from this repository.
Item Type: Article
Authors :
NameEmailORCID
Van Es, JJUNSPECIFIEDUNSPECIFIED
Gierak, JUNSPECIFIEDUNSPECIFIED
Forbes, RGr.forbes@surrey.ac.ukUNSPECIFIED
Suvorov, VGUNSPECIFIEDUNSPECIFIED
Van den Berghe, TUNSPECIFIEDUNSPECIFIED
Dubuisson, PUNSPECIFIEDUNSPECIFIED
Monnet, IUNSPECIFIEDUNSPECIFIED
Septier, AUNSPECIFIEDUNSPECIFIED
Date : 1 June 2004
Identification Number : https://doi.org/10.1016/j.mee.2004.02.029
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Optics, Physics, Applied, Engineering, Science & Technology - Other Topics, Physics, ENGINEERING, ELECTRICAL & ELECTRONIC, NANOSCIENCE & NANOTECHNOLOGY, OPTICS, PHYSICS, APPLIED, ELECTRON, EMISSION, FIELD, BEAMS
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:35
Last Modified : 17 May 2017 14:57
URI: http://epubs.surrey.ac.uk/id/eprint/831949

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