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PROCESSING OF TIN/TI METALLIZATION ON SILICON BY ARSENIC ION-IMPLANTATION

MILOSAVLJEVIC, M, BIBIC, N, PERUSKO, D, WILSON, IH and JEYNES, C (1990) PROCESSING OF TIN/TI METALLIZATION ON SILICON BY ARSENIC ION-IMPLANTATION In: 17TH INTERNATIONAL CONF ON METALLURGICAL COATINGS / 8TH INTERNATIONAL CONF ON THIN FILMS, 1990-04-02 - 1990-04-06, SAN DIEGO, CA.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
MILOSAVLJEVIC, MUNSPECIFIEDUNSPECIFIED
BIBIC, NUNSPECIFIEDUNSPECIFIED
PERUSKO, DUNSPECIFIEDUNSPECIFIED
WILSON, IHUNSPECIFIEDUNSPECIFIED
JEYNES, Cc.jeynes@surrey.ac.ukUNSPECIFIED
Date : 10 December 1990
Identification Number : https://doi.org/10.1016/0257-8972(90)90038-E
Contributors :
ContributionNameEmailORCID
publisherELSEVIER SCIENCE SA LAUSANNE, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Materials Science, Coatings & Films, Physics, Applied, Materials Science, Physics, MATERIALS SCIENCE, COATINGS & FILMS, PHYSICS, APPLIED, SI, FILMS, TISI2
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:32
Last Modified : 17 May 2017 14:57
URI: http://epubs.surrey.ac.uk/id/eprint/831752

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