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MONITORING THE MICRO-UNIFORMITY PERFORMANCE OF A SPINNING DISK IMPLANTER

CURRENT, MI, GUITNER, T, OHNO, N, HURLEY, K, KEENAN, WA, JOHNSON, W, HILLARD, RJ and JEYNES, C (1991) MONITORING THE MICRO-UNIFORMITY PERFORMANCE OF A SPINNING DISK IMPLANTER In: 8TH INTERNATIONAL CONF ON ION IMPLANTATION TECHNOLOGY, 1990-07-30 - 1990-08-03, UNIV SURREY, GUILDFORD, ENGLAND.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
CURRENT, MIUNSPECIFIEDUNSPECIFIED
GUITNER, TUNSPECIFIEDUNSPECIFIED
OHNO, NUNSPECIFIEDUNSPECIFIED
HURLEY, KUNSPECIFIEDUNSPECIFIED
KEENAN, WAUNSPECIFIEDUNSPECIFIED
JOHNSON, WUNSPECIFIEDUNSPECIFIED
HILLARD, RJUNSPECIFIEDUNSPECIFIED
JEYNES, Cc.jeynes@surrey.ac.ukUNSPECIFIED
Date : 1 April 1991
Identification Number : 10.1016/0168-583X(91)96156-F
Contributors :
ContributionNameEmailORCID
publisherELSEVIER SCIENCE BV, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:32
Last Modified : 17 May 2017 14:57
URI: http://epubs.surrey.ac.uk/id/eprint/831750

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