2 MEV AS+ IMPLANTATION IN INAS
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WENDLER, E, WILSON, RJ, JEYNES, C, WESCH, W, GARTNER, K, GWILLIAM, RM and SEALY, BJ (1995) 2 MEV AS+ IMPLANTATION IN INAS In: 10th International Conference on Ion Implantation Technology, 1994-06-13 - 1994-06-17, CATANIA, ITALY.
Full text not available from this repository.| Item Type: | Conference or Workshop Item (UNSPECIFIED) | ||||||||||||||||||||||||
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| Divisions : | Surrey research (other units) | ||||||||||||||||||||||||
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| Date : | 1 March 1995 | ||||||||||||||||||||||||
| DOI : | 10.1016/0168-583X(94)00504-4 | ||||||||||||||||||||||||
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| Uncontrolled Keywords : | Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, SEMICONDUCTORS, CRYSTALLINE, SILICON, MODEL | ||||||||||||||||||||||||
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| Depositing User : | Symplectic Elements | ||||||||||||||||||||||||
| Date Deposited : | 17 May 2017 11:32 | ||||||||||||||||||||||||
| Last Modified : | 23 Jan 2020 16:58 | ||||||||||||||||||||||||
| URI: | http://epubs.surrey.ac.uk/id/eprint/831731 |
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