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DAMAGE PRODUCTION DURING MEV ION-IMPLANTATION IN GAAS AND INAS

BACHMANN, T, WENDLER, E, WESCH, W, HERRE, O, WILSON, RJ, JEYNES, C, GWILLIAM, RM and SEALY, BJ (1995) DAMAGE PRODUCTION DURING MEV ION-IMPLANTATION IN GAAS AND INAS In: 13th International Conference on the Application of Accelerators in Research and Industry, 1994-11-07 - 1994-11-10, DENTON, TX.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
BACHMANN, TUNSPECIFIEDUNSPECIFIED
WENDLER, EUNSPECIFIEDUNSPECIFIED
WESCH, WUNSPECIFIEDUNSPECIFIED
HERRE, OUNSPECIFIEDUNSPECIFIED
WILSON, RJUNSPECIFIEDUNSPECIFIED
JEYNES, Cc.jeynes@surrey.ac.ukUNSPECIFIED
GWILLIAM, RMUNSPECIFIEDUNSPECIFIED
SEALY, BJUNSPECIFIEDUNSPECIFIED
Date : 1 May 1995
Identification Number : 10.1016/0168-583X(94)00565-6
Contributors :
ContributionNameEmailORCID
publisherELSEVIER SCIENCE BV, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, SEMICONDUCTORS, AMORPHIZATION, CRYSTALLINE, SILICON, MODEL
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:32
Last Modified : 17 May 2017 14:57
URI: http://epubs.surrey.ac.uk/id/eprint/831729

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