DAMAGE PRODUCTION DURING MEV ION-IMPLANTATION IN GAAS AND INAS

BACHMANN, T, WENDLER, E, WESCH, W, HERRE, O, WILSON, RJ, JEYNES, C, GWILLIAM, RM and SEALY, BJ (1995) DAMAGE PRODUCTION DURING MEV ION-IMPLANTATION IN GAAS AND INAS In: 13th International Conference on the Application of Accelerators in Research and Industry, 1994-11-07 - 1994-11-10, DENTON, TX.

Full text not available from this repository.

Item Type:	Conference or Workshop Item (UNSPECIFIED)
Authors :	Name Email ORCID BACHMANN, T UNSPECIFIED UNSPECIFIED WENDLER, E UNSPECIFIED UNSPECIFIED WESCH, W UNSPECIFIED UNSPECIFIED HERRE, O UNSPECIFIED UNSPECIFIED WILSON, RJ UNSPECIFIED UNSPECIFIED JEYNES, C c.jeynes@surrey.ac.uk UNSPECIFIED GWILLIAM, RM UNSPECIFIED UNSPECIFIED SEALY, BJ UNSPECIFIED UNSPECIFIED
Date :	1 May 1995
Identification Number :	https://doi.org/10.1016/0168-583X(94)00565-6
Contributors :	Contribution Name Email ORCID publisher ELSEVIER SCIENCE BV, UNSPECIFIED UNSPECIFIED
Uncontrolled Keywords :	Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, SEMICONDUCTORS, AMORPHIZATION, CRYSTALLINE, SILICON, MODEL
Related URLs :	Author
Depositing User :	Symplectic Elements
Date Deposited :	17 May 2017 11:32
Last Modified :	17 May 2017 14:57
URI:	http://epubs.surrey.ac.uk/id/eprint/831729

Actions (login required)

View Item

Downloads