DAMAGE PRODUCTION DURING MEV ION-IMPLANTATION IN GAAS AND INAS
Tools
Tools
Tools
BACHMANN, T, WENDLER, E, WESCH, W, HERRE, O, WILSON, RJ, JEYNES, C, GWILLIAM, RM and SEALY, BJ (1995) DAMAGE PRODUCTION DURING MEV ION-IMPLANTATION IN GAAS AND INAS In: 13th International Conference on the Application of Accelerators in Research and Industry, 1994-11-07 - 1994-11-10, DENTON, TX.
Full text not available from this repository.| Item Type: | Conference or Workshop Item (UNSPECIFIED) | |||||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Authors : |
|
|||||||||||||||||||||||||||
| Date : | 1 May 1995 | |||||||||||||||||||||||||||
| DOI : | 10.1016/0168-583X(94)00565-6 | |||||||||||||||||||||||||||
| Contributors : |
|
|||||||||||||||||||||||||||
| Uncontrolled Keywords : | Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, SEMICONDUCTORS, AMORPHIZATION, CRYSTALLINE, SILICON, MODEL | |||||||||||||||||||||||||||
| Related URLs : | ||||||||||||||||||||||||||||
| Depositing User : | Symplectic Elements | |||||||||||||||||||||||||||
| Date Deposited : | 17 May 2017 11:32 | |||||||||||||||||||||||||||
| Last Modified : | 16 Jan 2019 18:17 | |||||||||||||||||||||||||||
| URI: | http://epubs.surrey.ac.uk/id/eprint/831729 |
Actions (login required)
 |
View Item |
Downloads
Downloads per month over past year