DAMAGE PRODUCTION DURING MEV ION-IMPLANTATION IN GAAS AND INAS
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BACHMANN, T, WENDLER, E, WESCH, W, HERRE, O, WILSON, RJ, JEYNES, C, GWILLIAM, RM and SEALY, BJ (1995) DAMAGE PRODUCTION DURING MEV ION-IMPLANTATION IN GAAS AND INAS In: 13th International Conference on the Application of Accelerators in Research and Industry, 1994-11-07 - 1994-11-10, DENTON, TX.
Full text not available from this repository.| Item Type: | Conference or Workshop Item (UNSPECIFIED) | |||||||||||||||||||||||||||
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| Divisions : | Surrey research (other units) | |||||||||||||||||||||||||||
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| Date : | 1 May 1995 | |||||||||||||||||||||||||||
| DOI : | 10.1016/0168-583X(94)00565-6 | |||||||||||||||||||||||||||
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| Uncontrolled Keywords : | Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, SEMICONDUCTORS, AMORPHIZATION, CRYSTALLINE, SILICON, MODEL | |||||||||||||||||||||||||||
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| Depositing User : | Symplectic Elements | |||||||||||||||||||||||||||
| Date Deposited : | 17 May 2017 11:32 | |||||||||||||||||||||||||||
| Last Modified : | 23 Jan 2020 16:58 | |||||||||||||||||||||||||||
| URI: | http://epubs.surrey.ac.uk/id/eprint/831729 |
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