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RBS/simulated annealing and FTIR characterisation of BCN films deposited by dual cathode magnetron sputtering

Barradas, NP, Jeynes, C, Kusano, Y, Evetts, JE and Hutchings, IM (1999) RBS/simulated annealing and FTIR characterisation of BCN films deposited by dual cathode magnetron sputtering In: 15th International Conference on the Application of Accelerators in Research and Industry, 1998-11-04 - 1998-11-07, UNIV N TEXAS, DENTON, TX.

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
Barradas, NPUNSPECIFIEDUNSPECIFIED
Jeynes, Cc.jeynes@surrey.ac.ukUNSPECIFIED
Kusano, YUNSPECIFIEDUNSPECIFIED
Evetts, JEUNSPECIFIEDUNSPECIFIED
Hutchings, IMUNSPECIFIEDUNSPECIFIED
Date : 1 January 1999
Contributors :
ContributionNameEmailORCID
UNSPECIFIEDDuggan, JLUNSPECIFIEDUNSPECIFIED
UNSPECIFIEDMorgan, ILUNSPECIFIEDUNSPECIFIED
publisherAMER INST PHYSICS, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Physical Sciences, Technology, Chemistry, Physical, Materials Science, Characterization & Testing, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, Particles & Fields, Spectroscopy, Chemistry, Materials Science, Physics, CARBON NITRIDE FILMS, MECHANICAL-PROPERTIES, VAPOR-DEPOSITION, THIN-FILMS, NITROGEN, BORON, IMPLANTATION, COATINGS
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:31
Last Modified : 17 May 2017 14:57
URI: http://epubs.surrey.ac.uk/id/eprint/831682

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