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Surface amorphization of machined silicon

Puttick, K, Jeynes, C and Gee, T (1998) Surface amorphization of machined silicon In: 1998 Spring Topical Meeting of the ASPE on Silicon Machining, 1998-04-13 - 1998-04-16, CARMEL BY THE SEA, CA.

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
Puttick, KUNSPECIFIEDUNSPECIFIED
Jeynes, Cc.jeynes@surrey.ac.ukUNSPECIFIED
Gee, TUNSPECIFIEDUNSPECIFIED
Date : 1 January 1998
Contributors :
ContributionNameEmailORCID
publisherAMER SOC PRECISION ENGINEERING, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Technology, Engineering, Manufacturing, Engineering, Mechanical, Materials Science, Multidisciplinary, Engineering, Materials Science, CRYSTAL, DAMAGE
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:31
Last Modified : 17 May 2017 14:57
URI: http://epubs.surrey.ac.uk/id/eprint/831681

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