University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Electrical profiles of 20 nm junctions in Sb implanted silicon

Alzanki, T, Gwilliam, R, Emerson, N, Smith, A, Webb, R and Sealy, BJ (2006) Electrical profiles of 20 nm junctions in Sb implanted silicon In: 14th International Conference on Ion Beam Modification of Materials (IBMM 2004), 2004-09-05 - 2004-09-10, Pacific Grove, CA.

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
Alzanki, TUNSPECIFIEDUNSPECIFIED
Gwilliam, Rr.gwilliam@surrey.ac.ukUNSPECIFIED
Emerson, NUNSPECIFIEDUNSPECIFIED
Smith, AUNSPECIFIEDUNSPECIFIED
Webb, Rr.webb@surrey.ac.ukUNSPECIFIED
Sealy, BJUNSPECIFIEDUNSPECIFIED
Date : 1 January 2006
Identification Number : https://doi.org/10.1016/j.nimb.2005.08.091
Contributors :
ContributionNameEmailORCID
publisherELSEVIER SCIENCE BV, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, silicon, shallow junctions, antimony implants, electrical profiles
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:26
Last Modified : 17 May 2017 14:56
URI: http://epubs.surrey.ac.uk/id/eprint/831389

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year


Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800