University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Deactivation of submelt laser annealed arsenic ultrashallow junctions in silicon during subsequent thermal treatment

Giubertoni, D, Pepponi, G, Sahiner, MA, Kelty, SP, Gennaro, S, Bersani, M, Kah, M, Kirkby, KJ, Doherty, R, Foad, MA , Meirer, F, Streli, C, Woicik, JC and Pianetta, P (2010) Deactivation of submelt laser annealed arsenic ultrashallow junctions in silicon during subsequent thermal treatment JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 28 (1). C1B1-C1B5.

Full text not available from this repository.
Item Type: Article
Authors :
NameEmailORCID
Giubertoni, DUNSPECIFIEDUNSPECIFIED
Pepponi, GUNSPECIFIEDUNSPECIFIED
Sahiner, MAUNSPECIFIEDUNSPECIFIED
Kelty, SPUNSPECIFIEDUNSPECIFIED
Gennaro, SUNSPECIFIEDUNSPECIFIED
Bersani, MUNSPECIFIEDUNSPECIFIED
Kah, MUNSPECIFIEDUNSPECIFIED
Kirkby, KJk.kirkby@surrey.ac.ukUNSPECIFIED
Doherty, RUNSPECIFIEDUNSPECIFIED
Foad, MAUNSPECIFIEDUNSPECIFIED
Meirer, FUNSPECIFIEDUNSPECIFIED
Streli, CUNSPECIFIEDUNSPECIFIED
Woicik, JCUNSPECIFIEDUNSPECIFIED
Pianetta, PUNSPECIFIEDUNSPECIFIED
Date : 1 January 2010
Identification Number : 10.1116/1.3242637
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Physics, Applied, Engineering, Science & Technology - Other Topics, Physics, ENGINEERING, ELECTRICAL & ELECTRONIC, NANOSCIENCE & NANOTECHNOLOGY, PHYSICS, APPLIED, annealing, arsenic, diffusion, elemental semiconductors, EXAFS, ion implantation, secondary ion mass spectra, semiconductor doping, silicon, IMPLANTED SILICON, DOPED SILICON, DIFFUSION, SI
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:26
Last Modified : 17 May 2017 14:56
URI: http://epubs.surrey.ac.uk/id/eprint/831351

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year


Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800