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Understanding ion implantation defects in germanium

Peaker, AR, Markevich, VP, Slotte, J, Rummukainen, M, Capan, I, Pivac, B, Gwilliam, R, Jeynes, C and Dobaczewski, L (2006) Understanding ion implantation defects in germanium ECS Transactions, 3 (2). pp. 67-76.

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Abstract

The recent interest in germanium as an alternative channel material for PMOS has revealed major differences from silicon in relation to ion implantation. In this paper we describe some initial results of a fundamental study into defect creation and removal in ion implanted germanium. In this stage of the work we have used silicon and germanium implants into germanium and into germanium rich silicon-germanium. The defect evolution in these samples is compared with electron and neutron irradiated material using annealing studies in conjunction with deep level transient spectroscopy, positron annihilation and Rutherford back scattering. It is proposed that both vacancy and interstitial clustering are important mechanisms in implanted germanium and the likely significance of this is discussed. copyright The Electrochemical Society.

Item Type: Article
Authors :
NameEmailORCID
Peaker, ARUNSPECIFIEDUNSPECIFIED
Markevich, VPUNSPECIFIEDUNSPECIFIED
Slotte, JUNSPECIFIEDUNSPECIFIED
Rummukainen, MUNSPECIFIEDUNSPECIFIED
Capan, IUNSPECIFIEDUNSPECIFIED
Pivac, BUNSPECIFIEDUNSPECIFIED
Gwilliam, Rr.gwilliam@surrey.ac.ukUNSPECIFIED
Jeynes, Cc.jeynes@surrey.ac.ukUNSPECIFIED
Dobaczewski, LUNSPECIFIEDUNSPECIFIED
Date : 1 December 2006
Identification Number : 10.1149/1.2356265
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:23
Last Modified : 17 May 2017 14:56
URI: http://epubs.surrey.ac.uk/id/eprint/831139

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