University of Surrey

Test tubes in the lab Research in the ATI Dance Research

An all-silicon channel waveguide fabricated using direct proton beam writing

Teo, EJ, Bettiol, AA, Breese, MBH, Yang, PY, Mashanovich, GZ, Headley, WR, Reed, GT and Blackwood, DJ (2008) An all-silicon channel waveguide fabricated using direct proton beam writing In: Silicon Photonics III, 2008-01-21 - 2008-01-24, San Jose, USA.

Full text not available from this repository.

Abstract

We report a novel technique for the fabrication of an all-silicon channel waveguide using direct proton beam writing and subsequent electrochemical etching. A focused beam of high energy protons is used to selectively inhibit porous silicon formation in the irradiated regions. By over-etching beyond the ion range, the irradiated region becomes surrounded by porous silicon cladding. Waveguide characterization carried out at 1550 nm on the proton irradiated waveguide shows that the propagation losses improve significantly from 20±2 dB/cm to 9±2 dB/cm after vacuum annealing at 800°C for 1 hour.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
Teo, EJUNSPECIFIEDUNSPECIFIED
Bettiol, AAUNSPECIFIEDUNSPECIFIED
Breese, MBHUNSPECIFIEDUNSPECIFIED
Yang, PYpengyuan.yang@surrey.ac.ukUNSPECIFIED
Mashanovich, GZg.mashanovich@surrey.ac.ukUNSPECIFIED
Headley, WRw.headley@surrey.ac.ukUNSPECIFIED
Reed, GTg.reed@surrey.ac.ukUNSPECIFIED
Blackwood, DJUNSPECIFIEDUNSPECIFIED
Date : 2008
Identification Number : 10.1117/12.762771
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:16
Last Modified : 17 May 2017 14:55
URI: http://epubs.surrey.ac.uk/id/eprint/830703

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year


Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800