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Vacancy engineering - An ultra-low thermal budget method for high-concentration 'diffusionless' implantation doping

Cowern, NEB, Smith, AJ, Bennett, N, Sealy, BJ, Gwilliam, R, Webb, RP, Colombeau, B, Paul, S, Lerch, W and Pakfar, A (2008) Vacancy engineering - An ultra-low thermal budget method for high-concentration 'diffusionless' implantation doping Materials Science Forum, 573-57. pp. 295-304.

Full text not available from this repository.
Item Type: Article
Authors :
NameEmailORCID
Cowern, NEBUNSPECIFIEDUNSPECIFIED
Smith, AJa.j.smith@surrey.ac.ukUNSPECIFIED
Bennett, NUNSPECIFIEDUNSPECIFIED
Sealy, BJUNSPECIFIEDUNSPECIFIED
Gwilliam, Rr.gwilliam@surrey.ac.ukUNSPECIFIED
Webb, RPr.webb@surrey.ac.ukUNSPECIFIED
Colombeau, BUNSPECIFIEDUNSPECIFIED
Paul, SUNSPECIFIEDUNSPECIFIED
Lerch, WUNSPECIFIEDUNSPECIFIED
Pakfar, AUNSPECIFIEDUNSPECIFIED
Date : 2008
Identification Number : https://doi.org/10.4028/www.scientific.net/MSF.573-574.295
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:13
Last Modified : 17 May 2017 14:55
URI: http://epubs.surrey.ac.uk/id/eprint/830518

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