Shallow junctions in silicon via low thermal budget processing

Sealy, BJ, Smith, AJ, Alzanki, T, Bennett, N, Li, L, Jeynes, C, Colombeau, B, Collart, EJH, Emerson, NG, Gwilliam, RM et al and Cowern, NEB (2006) Shallow junctions in silicon via low thermal budget processing Extended Abstracts of the Sixth International Workshop on Junction Technology, IWJT '06. pp. 10-15.

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Item Type:	Article
Authors :	Name Email ORCID Sealy, BJ Smith, AJ a.j.smith@surrey.ac.uk Alzanki, T Bennett, N Li, L Jeynes, C c.jeynes@surrey.ac.uk Colombeau, B Collart, EJH Emerson, NG n.emerson@surrey.ac.uk Gwilliam, RM r.gwilliam@surrey.ac.uk Cowern, NEB
Date :	2006
Depositing User :	Symplectic Elements
Date Deposited :	17 May 2017 11:13
Last Modified :	17 May 2017 14:55
URI:	http://epubs.surrey.ac.uk/id/eprint/830505

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