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Shallow junctions in silicon via low thermal budget processing

Sealy, BJ, Smith, AJ, Alzanki, T, Bennett, N, Li, L, Jeynes, C, Colombeau, B, Collart, EJH, Emerson, NG, Gwilliam, RM and Cowern, NEB (2006) Shallow junctions in silicon via low thermal budget processing Extended Abstracts of the Sixth International Workshop on Junction Technology, IWJT '06. pp. 10-15.

Full text not available from this repository.
Item Type: Article
Authors :
NameEmailORCID
Sealy, BJ
Smith, AJa.j.smith@surrey.ac.uk
Alzanki, T
Bennett, N
Li, L
Jeynes, Cc.jeynes@surrey.ac.uk
Colombeau, B
Collart, EJH
Emerson, NGn.emerson@surrey.ac.uk
Gwilliam, RMr.gwilliam@surrey.ac.uk
Cowern, NEB
Date : 2006
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:13
Last Modified : 17 May 2017 14:55
URI: http://epubs.surrey.ac.uk/id/eprint/830505

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