New developments in the applications of proton beam writing

Mistry, P, Gomez-Morilla, I, Grime, GW, Webb, RP, Gwilliam, R, Cansell, A, Merchant, M, Kirkby, KJ, Teo, EJ, Breese, MBH et al, Bettiol, AA, Blackwood, DJ and Watt, F (2005) New developments in the applications of proton beam writing In: 15th International Conference on Ion Implantation Technology, 2004-10-25 - 2004-10-27, Taipei, TAIWAN.

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Item Type:	Conference or Workshop Item (UNSPECIFIED)
Divisions :	Surrey research (other units)
Authors :	Name Email ORCID Mistry, P Gomez-Morilla, I Grime, GW g.grime@surrey.ac.uk Webb, RP r.webb@surrey.ac.uk Gwilliam, R Cansell, A Merchant, M m.merchant@surrey.ac.uk Kirkby, KJ Teo, EJ Breese, MBH Bettiol, AA Blackwood, DJ Watt, F
Date :	1 August 2005
DOI :	10.1016/j.nimb.2005.04.099
Contributors :	Contribution Name Email ORCID publisher ELSEVIER SCIENCE BV,
Uncontrolled Keywords :	Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, proton beam writing, GaAs, silicon, electrochemical etching, ION-BEAM, FACILITY, PMMA
Related URLs :	Author
Depositing User :	Symplectic Elements
Date Deposited :	17 May 2017 11:05
Last Modified :	23 Jan 2020 16:26
URI:	http://epubs.surrey.ac.uk/id/eprint/829936

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