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New developments in the applications of proton beam writing

Mistry, P, Gomez-Morilla, I, Grime, GW, Webb, RP, Gwilliam, R, Cansell, A, Merchant, M, Kirkby, KJ, Teo, EJ, Breese, MBH, Bettiol, AA, Blackwood, DJ and Watt, F (2005) New developments in the applications of proton beam writing In: 15th International Conference on Ion Implantation Technology, 2004-10-25 - 2004-10-27, Taipei, TAIWAN.

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
Mistry, PUNSPECIFIEDUNSPECIFIED
Gomez-Morilla, IUNSPECIFIEDUNSPECIFIED
Grime, GWg.grime@surrey.ac.ukUNSPECIFIED
Webb, RPr.webb@surrey.ac.ukUNSPECIFIED
Gwilliam, RUNSPECIFIEDUNSPECIFIED
Cansell, AUNSPECIFIEDUNSPECIFIED
Merchant, Mm.merchant@surrey.ac.ukUNSPECIFIED
Kirkby, KJUNSPECIFIEDUNSPECIFIED
Teo, EJUNSPECIFIEDUNSPECIFIED
Breese, MBHUNSPECIFIEDUNSPECIFIED
Bettiol, AAUNSPECIFIEDUNSPECIFIED
Blackwood, DJUNSPECIFIEDUNSPECIFIED
Watt, FUNSPECIFIEDUNSPECIFIED
Date : 1 August 2005
Identification Number : https://doi.org/10.1016/j.nimb.2005.04.099
Contributors :
ContributionNameEmailORCID
publisherELSEVIER SCIENCE BV, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, proton beam writing, GaAs, silicon, electrochemical etching, ION-BEAM, FACILITY, PMMA
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:05
Last Modified : 17 May 2017 14:54
URI: http://epubs.surrey.ac.uk/id/eprint/829936

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