Mistry, P, Gomez-Morilla, I, Grime, GW, Webb, RP, Gwilliam, R, Cansell, A, Merchant, M, Kirkby, KJ, Teo, EJ, Breese, MBH et al, Bettiol, AA, Blackwood, DJ and Watt, F
(2005)
New developments in the applications of proton beam writing
In: 15th International Conference on Ion Implantation Technology, 2004-10-25 - 2004-10-27, Taipei, TAIWAN.
Full text not available from this repository.
Item Type: |
Conference or Workshop Item
(UNSPECIFIED)
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Divisions
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Surrey research (other units)
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Authors
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Mistry, P | | | Gomez-Morilla, I | | | Grime, GW | g.grime@surrey.ac.uk | | Webb, RP | r.webb@surrey.ac.uk | | Gwilliam, R | | | Cansell, A | | | Merchant, M | m.merchant@surrey.ac.uk | | Kirkby, KJ | | | Teo, EJ | | | Breese, MBH | | | Bettiol, AA | | | Blackwood, DJ | | | Watt, F | | |
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Date
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1 August 2005
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DOI
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10.1016/j.nimb.2005.04.099
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Contributors
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publisher | ELSEVIER SCIENCE BV, | | |
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Uncontrolled Keywords
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Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, proton beam writing, GaAs, silicon, electrochemical etching, ION-BEAM, FACILITY, PMMA
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Related URLs
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Depositing User
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Symplectic Elements
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Date Deposited
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17 May 2017 11:05
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Last Modified
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23 Jan 2020 16:26
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URI: |
http://epubs.surrey.ac.uk/id/eprint/829936 |
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