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A study of the surface chemistry, morphology and wear of silicon based MEMS

Li, J, Cui, Z and Baker, MA (2004) A study of the surface chemistry, morphology and wear of silicon based MEMS In: 10th European Conference on Applications of Surface and Interface Analysis (ECASIA 03), 2003-10-05 - 2003-10-10, Berlin, GERMANY.

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
Li, JUNSPECIFIEDUNSPECIFIED
Cui, ZUNSPECIFIEDUNSPECIFIED
Baker, MAm.baker@surrey.ac.ukUNSPECIFIED
Date : 1 August 2004
Identification Number : 10.1002/sia.1888
Contributors :
ContributionNameEmailORCID
publisherJOHN WILEY & SONS LTD, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Physical Sciences, Chemistry, Physical, Chemistry, CHEMISTRY, PHYSICAL, microelectromechanical systems, XPS, atomic force microscopy, wear, ATOMIC-FORCE MICROSCOPY, NANOTRIBOLOGICAL PROPERTIES, MONOLAYER FILMS, IV, SI
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:04
Last Modified : 17 May 2017 14:54
URI: http://epubs.surrey.ac.uk/id/eprint/829873

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