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Surface characterisation of silicon based MEMS

Li, J, Cui, Z and Baker, MA (2004) Surface characterisation of silicon based MEMS In: 10th Joint Conference of Chinese-Society-of-Chemical-Science-and-Technology/United-Kingdom-Society-of-Chemical-Society, 2003-09-13 - ?, Univ Coll London, Logrono, ENGLAND.

Full text not available from this repository.
Item Type: Conference or Workshop Item (UNSPECIFIED)
Authors :
NameEmailORCID
Li, JUNSPECIFIEDUNSPECIFIED
Cui, ZUNSPECIFIEDUNSPECIFIED
Baker, MAm.baker@surrey.ac.ukUNSPECIFIED
Date : 1 July 2004
Contributors :
ContributionNameEmailORCID
publisherHIGHER EDUCATION PRESS, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Physical Sciences, Chemistry, Multidisciplinary, Chemistry, CHEMISTRY, MULTIDISCIPLINARY, microelectromechanical systems, XPS, atomic force microscopy, ATOMIC-FORCE MICROSCOPY, MONOLAYER FILMS, SIO2, IV
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:04
Last Modified : 17 May 2017 14:54
URI: http://epubs.surrey.ac.uk/id/eprint/829868

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