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Fabrication of silicon-blazed gratings for couplers

Ang, TW, Reed, GT, Evans, AGR, Routley, PR and Josey, MR (2000) Fabrication of silicon-blazed gratings for couplers FIBER AND INTEGRATED OPTICS, 19 (1). pp. 25-29.

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Item Type: Article
Divisions : Surrey research (other units)
Authors :
Ang, TW
Evans, AGR
Routley, PR
Josey, MR
Date : 1 January 2000
Uncontrolled Keywords : Science & Technology, Physical Sciences, Optics, OPTICS, blazed gratings, electron beam lithography, grating couplers, ion beam etching, OPTICAL-PHASE MODULATOR
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 11:00
Last Modified : 24 Jan 2020 20:12

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