University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Interaction of the end of range defect band with the upper buried oxide interface for B and BF2 implants in Si and silicon on insulator with and without preamorphizing implant

Kah, M, Smith, AJ, Hamilton, JJ, Sharp, J, Yeong, SH, Colombeau, B, Gwilliam, R, Webb, RP and Kirkby, KJ (2008) Interaction of the end of range defect band with the upper buried oxide interface for B and BF2 implants in Si and silicon on insulator with and without preamorphizing implant JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 26 (1). pp. 347-350.

Full text not available from this repository.

Abstract

The International Roadmap for Semiconductors requires ultrashallow, highly activated, abrupt dopant profiles in the source/drain extension regions, for technology nodes beyond 45 nm. The authors contrast B and BF2 implants in Si and silicon on insulator (SOI) substrates with and without a preamorphizing implant (PAI). The objective of the study is to compare between Si and SOI substrates, PAI and non-PAI condition, and B and BF2 implants. The results show the absence of the "reverse annealing effect" in BF2 implants, which is observed in B implants. The presence of F appears to impede the formation of boron interstitial clusters, which is shown in the case of B implant. The BF2 implants follow a similar trend for SOI and Si with and without PAI. (C) 2008 American Vacuum Society.

Item Type: Article
Authors :
NameEmailORCID
Kah, MUNSPECIFIEDUNSPECIFIED
Smith, AJa.j.smith@surrey.ac.ukUNSPECIFIED
Hamilton, JJj.hamilton@surrey.ac.ukUNSPECIFIED
Sharp, JUNSPECIFIEDUNSPECIFIED
Yeong, SHUNSPECIFIEDUNSPECIFIED
Colombeau, BUNSPECIFIEDUNSPECIFIED
Gwilliam, Rr.gwilliam@surrey.ac.ukUNSPECIFIED
Webb, RPr.webb@surrey.ac.ukUNSPECIFIED
Kirkby, KJk.kirkby@surrey.ac.ukUNSPECIFIED
Date : January 2008
Identification Number : 10.1116/1.2816936
Uncontrolled Keywords : DIFFUSION
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 10:56
Last Modified : 17 May 2017 14:53
URI: http://epubs.surrey.ac.uk/id/eprint/829388

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year


Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800