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XPS Investigation of Monatomic and Cluster Argon Ion Sputtering of Tantalum Pentoxide

Simpson, Robin, White, RG, Watts, John and Baker, Mark (2017) XPS Investigation of Monatomic and Cluster Argon Ion Sputtering of Tantalum Pentoxide Applied Surface Science, 405. pp. 79-87.

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Abstract

In recent years, gas cluster ion beams (GCIB) have become the cutting edge of ion beam technology to sputter etch organic materials in surface analysis. However, little is currently known on the ability of argon cluster ions (Arn+) to etch metal oxides and other technologically important inorganic compounds and no depth profiles have previously been reported. In this work, XPS depth profiles through a certified (European standard BCR-261T) 30 nm thick Ta2O5 layer grown on Ta foil using monatomic Ar+ and Ar1000+ cluster ions have been performed at different incident energies. The preferential sputtering of oxygen induced using 6 keV Ar1000+ ions is lower relative to 3 keV and 500 eV Ar+ ions. The depth profiling etch rate and depth resolution is substantially better for the monatomic beam compared to the cluster beam. Ar+ ions exhibit a steady state O/Ta ratio through the bulk oxide but Ar1000+ ions show a gradual decrease in the O/Ta ratio as a function of depth. Higher residual O concentrations are observed on the Ta bulk metal for the Ar1000+ profiles compared to the Ar+ profiles.

Item Type: Article
Subjects : Mechanical Engineering Science
Divisions : Faculty of Engineering and Physical Sciences > Mechanical Engineering Sciences
Authors :
NameEmailORCID
Simpson, Robinr.simpson@surrey.ac.ukUNSPECIFIED
White, RGUNSPECIFIEDUNSPECIFIED
Watts, JohnJ.Watts@surrey.ac.ukUNSPECIFIED
Baker, MarkM.Baker@surrey.ac.ukUNSPECIFIED
Date : 3 February 2017
Identification Number : 10.1016/j.apsusc.2017.02.006
Copyright Disclaimer : © 2017 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/)
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 01 Mar 2017 18:32
Last Modified : 19 Jul 2017 08:38
URI: http://epubs.surrey.ac.uk/id/eprint/813509

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