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Fabrication of three-dimensional SU-8 microchannels by proton beam writing for microfluidics applications: Fluid flow characterisation

Al-Shehri, S, Palitsin, Vladimir, Webb, Roger and Grime, Geoffrey (2015) Fabrication of three-dimensional SU-8 microchannels by proton beam writing for microfluidics applications: Fluid flow characterisation Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 348. pp. 223-228.

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Abstract

The proton beam writing (PBW) technique was used to fabricate microfluidic structures in SU-8 resist. A network of the buried channels was fabricated as part of a project to develop functional microfluidic device for neuronal studies and self-powered microfluidics. Protons with energies between 2.5 MeV and 0.75 MeV were used to fabricate the buried channels with a minimum feature size of around 1 μm and depths of 40–55 μm. Roughness of channels sidewalls was around 2.5 nm rms. Exposure regime and examples of functional networks fabricated using PBW are described. COMSOL Multiphysics® software was used to model the flow characteristics of fluid in the SU-8 microchannels structured by PBW. The results obtained using PBW are compared with the structures fabricated by UV-lithography.

Item Type: Article
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering
Authors :
NameEmailORCID
Al-Shehri, SUNSPECIFIEDUNSPECIFIED
Palitsin, VladimirV.Palitsin@surrey.ac.ukUNSPECIFIED
Webb, RogerR.Webb@surrey.ac.ukUNSPECIFIED
Grime, GeoffreyG.Grime@surrey.ac.ukUNSPECIFIED
Date : 1 April 2015
Identification Number : 10.1016/j.nimb.2014.12.014
Depositing User : Symplectic Elements
Date Deposited : 05 Jul 2017 14:12
Last Modified : 05 Jul 2017 14:12
URI: http://epubs.surrey.ac.uk/id/eprint/809232

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