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Fabrication and characterization of annular-array, high-frequency, ultrasonic transducers based on PZT thick film

Wang, D, Filoux, E, Levassort, F, Lethiecq, M, Rocks, SA and Dorey, RA (2014) Fabrication and characterization of annular-array, high-frequency, ultrasonic transducers based on PZT thick film SENSORS AND ACTUATORS A-PHYSICAL, 216. pp. 207-213.

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Abstract

In this work, low temperature deposition of ceramics, in combination with micromachining techniques have been used to fabricate a kerfed, annular-array, high-frequency, micro ultrasonic transducer (with seven elements). This transducer was based on PZT thick film and operated in thickness mode. The 27 μm thick PZT film was fabricated using a low temperature (720 °C) composite sol-gel ceramic (sol + ceramic powder) deposition technique. Chemical wet etching was used to pattern the PZT thick film to produce the annular array ultrasonic transducer with a kerf of 90 μm between rings. A 67 MHz parallel resonant frequency in air was obtained. Pulse-echo responses were measured in water, showing that this device was able to operate in water medium. The resonance frequency and pulse-echo response have shown the frequency response presented additional resonance mode, which were due to the lateral modes induced by the small width-to-height ratios, especially for peripheral rings. A hybrid finite-difference (FD) and pseudospectral time-domain (PSTD) method (FD-PSTD) was used to simulate the acoustic field characteristics of two types of annular devices. One has no physical separation of the rings while the other has 90 μm kerf between each ring. The results show that the kerfed annular-array device has higher sensitivity than the kerfless one.

Item Type: Article
Divisions : Faculty of Engineering and Physical Sciences > Mechanical Engineering Sciences
Authors :
AuthorsEmailORCID
Wang, DUNSPECIFIEDUNSPECIFIED
Filoux, EUNSPECIFIEDUNSPECIFIED
Levassort, FUNSPECIFIEDUNSPECIFIED
Lethiecq, MUNSPECIFIEDUNSPECIFIED
Rocks, SAUNSPECIFIEDUNSPECIFIED
Dorey, RAUNSPECIFIEDUNSPECIFIED
Date : 1 September 2014
Identification Number : 10.1016/j.sna.2014.05.026
Uncontrolled Keywords : Science & Technology, Technology, Engineering, Electrical & Electronic, Instruments & Instrumentation, Engineering, ENGINEERING, ELECTRICAL & ELECTRONIC, INSTRUMENTS & INSTRUMENTATION, PZT, Thick film, Ultrasonic transducer, Annular array, PIEZOELECTRIC TRANSDUCERS, CERAMICS, MHZ, TECHNOLOGY
Related URLs :
Additional Information : © 2014. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
Depositing User : Symplectic Elements
Date Deposited : 28 Oct 2015 12:13
Last Modified : 28 Oct 2015 12:13
URI: http://epubs.surrey.ac.uk/id/eprint/808918

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