University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Analysis of Silicon Germanium Standards for the Quantification of SiGe Microelectronic Devices using AES

Watts, JF, Mallinson, CF, Littlejohns, CG, Gardes, FY and Castle, JE (2015) Analysis of Silicon Germanium Standards for the Quantification of SiGe Microelectronic Devices using AES Surface Science Spectra, 22. pp. 32-46.

[img]
Preview
Text
Analysis+of+Silicon+Germanium+Standards+for+the+Quantification+of+SiGe+Microelectronic+Devices+using+AES compressed.pdf - ["content_typename_Published version (Publisher's proof or final PDF)" not defined]
Available under License : See the attached licence file.

Download (911kB) | Preview
[img]
Preview
PDF (licence)
SRI_deposit_agreement.pdf
Available under License : See the attached licence file.

Download (33kB) | Preview

Abstract

Four samples of well-defined silicon-germanium alloys were used as standards for calibration purposes to allow accurate quantification of silicon-germanium-on-insulator (SGOI) microelectronic devices using Auger electron spectroscopy. Narrow Si KLL and the Ge LMM, high resolution Si KL_2,3L_2,3 and Ge L_3M_4,5M_4,5 together with survey spectra were collected and are presented from each sample. A matrix effect was observed for silicon in germanium and calculated as 0.85 and 0.95 for the Ge77.5Si22.5 Ge52.4Si47.6 alloys respectively.

Item Type: Article
Divisions : Faculty of Engineering and Physical Sciences > Mechanical Engineering Sciences
Authors :
AuthorsEmailORCID
Watts, JFUNSPECIFIEDUNSPECIFIED
Mallinson, CFUNSPECIFIEDUNSPECIFIED
Littlejohns, CGUNSPECIFIEDUNSPECIFIED
Gardes, FYUNSPECIFIEDUNSPECIFIED
Castle, JEUNSPECIFIEDUNSPECIFIED
Date : 18 March 2015
Identification Number : 10.1116/11.20141102
Uncontrolled Keywords : Silicon, Germanium, SGOI, Silicon-germanium on insulator, AES, Quantification
Additional Information : Copyright 2015 American Vacuum Society
Depositing User : Symplectic Elements
Date Deposited : 08 Sep 2015 14:57
Last Modified : 08 Sep 2015 14:57
URI: http://epubs.surrey.ac.uk/id/eprint/808225

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year


Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800