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Round Robin: measurement of H implantation distributions in Si by elastic recoil detection

Boudreault, G, Elliman, RG, Grotzschel, R, Gujrathi, SC, Jeynes, C, Lennard, WN, Rauhala, E, Sajavaara, T, Timmers, H, Wang, YQ and Weijers, TDM (2004) Round Robin: measurement of H implantation distributions in Si by elastic recoil detection NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 222 (3-4). pp. 547-566.

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Item Type: Article
Authors :
AuthorsEmailORCID
Boudreault, GUNSPECIFIEDUNSPECIFIED
Elliman, RGUNSPECIFIEDUNSPECIFIED
Grotzschel, RUNSPECIFIEDUNSPECIFIED
Gujrathi, SCUNSPECIFIEDUNSPECIFIED
Jeynes, CUNSPECIFIEDUNSPECIFIED
Lennard, WNUNSPECIFIEDUNSPECIFIED
Rauhala, EUNSPECIFIEDUNSPECIFIED
Sajavaara, TUNSPECIFIEDUNSPECIFIED
Timmers, HUNSPECIFIEDUNSPECIFIED
Wang, YQUNSPECIFIEDUNSPECIFIED
Weijers, TDMUNSPECIFIEDUNSPECIFIED
Date : 1 August 2004
Identification Number : https://doi.org/10.1016/j.nimb.2004.02.022
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, ERDA, NRA, hydrogen, silicon, implant standards, GAS-IONIZATION DETECTORS, ION-BEAM ANALYSIS, HYDROGEN, SILICON, CALIBRATION, DEPTH, HE-4, RBS, BACKSCATTERING, SIMULATION
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 28 Mar 2017 13:14
Last Modified : 28 Mar 2017 13:14
URI: http://epubs.surrey.ac.uk/id/eprint/806539

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