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A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films

Barradas, NP, Added, N, Arnoldbik, WM, Bogdanovic-Radovic, I, Bohne, W, Cardoso, S, Danner, C, Dytlewski, N, Freitas, PP, Jaksic, M , Jeynes, C, Krug, C, Lennard, WN, Lindner, S, Linsmeier, C, Medunic, Z, Pelicon, P, Pezzi, RP, Radtke, C, Rohrich, J, Sajavaara, T, Salgado, TDM, Stedile, FC, Tabacniks, MH and Vickridge, I (2005) A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 227 (3). pp. 397-419.

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Item Type: Article
Authors :
NameEmailORCID
Barradas, NP
Added, N
Arnoldbik, WM
Bogdanovic-Radovic, I
Bohne, W
Cardoso, S
Danner, C
Dytlewski, N
Freitas, PP
Jaksic, M
Jeynes, C
Krug, C
Lennard, WN
Lindner, S
Linsmeier, C
Medunic, Z
Pelicon, P
Pezzi, RP
Radtke, C
Rohrich, J
Sajavaara, T
Salgado, TDM
Stedile, FC
Tabacniks, MH
Vickridge, I
Date : 1 January 2005
Identification Number : 10.1016/j.nimb.2004.08.021
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, round robin, thin films, ion beam analysis, oxynitrides, tunnel junction barrier, DEPENDENT TUNNEL-JUNCTIONS, ALUMINUM-OXYNITRIDE FILMS, ENERGY ION-SCATTERING, QUANTITATIVE-ANALYSIS, RBS, SI, SILICON, RESISTANCE, HYDROGEN, CALIBRATION
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 28 Mar 2017 13:14
Last Modified : 31 Oct 2017 17:07
URI: http://epubs.surrey.ac.uk/id/eprint/806534

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