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A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films

Barradas, NP, Added, N, Arnoldbik, WM, Bogdanovic-Radovic, I, Bohne, W, Cardoso, S, Danner, C, Dytlewski, N, Freitas, PP, Jaksic, M, Jeynes, C, Krug, C, Lennard, WN, Lindner, S, Linsmeier, C, Medunic, Z, Pelicon, P, Pezzi, RP, Radtke, C, Rohrich, J, Sajavaara, T, Salgado, TDM, Stedile, FC, Tabacniks, MH and Vickridge, I (2005) A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 227 (3). pp. 397-419.

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Item Type: Article
Authors :
AuthorsEmailORCID
Barradas, NPUNSPECIFIEDUNSPECIFIED
Added, NUNSPECIFIEDUNSPECIFIED
Arnoldbik, WMUNSPECIFIEDUNSPECIFIED
Bogdanovic-Radovic, IUNSPECIFIEDUNSPECIFIED
Bohne, WUNSPECIFIEDUNSPECIFIED
Cardoso, SUNSPECIFIEDUNSPECIFIED
Danner, CUNSPECIFIEDUNSPECIFIED
Dytlewski, NUNSPECIFIEDUNSPECIFIED
Freitas, PPUNSPECIFIEDUNSPECIFIED
Jaksic, MUNSPECIFIEDUNSPECIFIED
Jeynes, CUNSPECIFIEDUNSPECIFIED
Krug, CUNSPECIFIEDUNSPECIFIED
Lennard, WNUNSPECIFIEDUNSPECIFIED
Lindner, SUNSPECIFIEDUNSPECIFIED
Linsmeier, CUNSPECIFIEDUNSPECIFIED
Medunic, ZUNSPECIFIEDUNSPECIFIED
Pelicon, PUNSPECIFIEDUNSPECIFIED
Pezzi, RPUNSPECIFIEDUNSPECIFIED
Radtke, CUNSPECIFIEDUNSPECIFIED
Rohrich, JUNSPECIFIEDUNSPECIFIED
Sajavaara, TUNSPECIFIEDUNSPECIFIED
Salgado, TDMUNSPECIFIEDUNSPECIFIED
Stedile, FCUNSPECIFIEDUNSPECIFIED
Tabacniks, MHUNSPECIFIEDUNSPECIFIED
Vickridge, IUNSPECIFIEDUNSPECIFIED
Date : 1 January 2005
Identification Number : https://doi.org/10.1016/j.nimb.2004.08.021
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, round robin, thin films, ion beam analysis, oxynitrides, tunnel junction barrier, DEPENDENT TUNNEL-JUNCTIONS, ALUMINUM-OXYNITRIDE FILMS, ENERGY ION-SCATTERING, QUANTITATIVE-ANALYSIS, RBS, SI, SILICON, RESISTANCE, HYDROGEN, CALIBRATION
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 28 Mar 2017 13:14
Last Modified : 28 Mar 2017 13:14
URI: http://epubs.surrey.ac.uk/id/eprint/806534

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