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Quality assurance in an implantation laboratory by high accuracy RBS

Jeynes, C, Peng, N, Barradas, NP and Gwilliam, RM (2006) Quality assurance in an implantation laboratory by high accuracy RBS NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 249. pp. 482-485.

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Item Type: Article
Authors :
NameEmailORCID
Jeynes, CUNSPECIFIEDUNSPECIFIED
Peng, NUNSPECIFIEDUNSPECIFIED
Barradas, NPUNSPECIFIEDUNSPECIFIED
Gwilliam, RMUNSPECIFIEDUNSPECIFIED
Date : 1 August 2006
Identification Number : 10.1016/j.nimb.2006.03.171
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, implantation, QA, accurate Rutherford backscattering, ION-BEAM ANALYSIS, SILICON
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 28 Mar 2017 13:14
Last Modified : 31 Oct 2017 17:06
URI: http://epubs.surrey.ac.uk/id/eprint/806518

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