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XTEM characterization of modulated ion implantation through self-organized anodic aluminum oxide (AAO) membranes

Guan, W, Ghatak, J, Peng, Y, Möbus, G, Peng, N and Jeynes, C (2011) XTEM characterization of modulated ion implantation through self-organized anodic aluminum oxide (AAO) membranes Materials Research Society Symposium Proceedings, 1411. pp. 49-54.

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Abstract

Penetration of a nanochannel mask by 190keV Co ions is tested for the purpose of achieving laterally modulated ion implantation into a SiO thin film on a Si substrate. A 2D-nanoporous membrane of anodic aluminum oxide (AAO) is chosen as the mask. Criteria and challenges for designing the mask are presented. Implantation experiments through a mask with pore diameter of 125 nm and inter-pore distance of 260 nm are carried out. Cross-sectional TEM (XTEM) is shown as an ideal tool to assess depth distribution and lateral distribution of implanted ions at the same time, complemented by Rutherford backscattering spectroscopy. Using energy dispersive x-ray spectroscopy linescans, a Co distribution with lateral modulation is found at 120 nm below the oxide surface. First experiments in converting the atomic distribution of Co to discrete nanoparticles by in-situ TEM annealing are presented. © 2012 Materials Research Society.

Item Type: Article
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Ion Beam Centre
Authors :
AuthorsEmailORCID
Guan, WUNSPECIFIEDUNSPECIFIED
Ghatak, JUNSPECIFIEDUNSPECIFIED
Peng, YUNSPECIFIEDUNSPECIFIED
Möbus, GUNSPECIFIEDUNSPECIFIED
Peng, NUNSPECIFIEDUNSPECIFIED
Jeynes, CUNSPECIFIEDUNSPECIFIED
Date : 2011
Identification Number : 10.1557/opl.2012.757
Additional Information : © 2012 Materials Research Society. The article may be found at http://dx.doi.org/10.1557/opl.2012.757
Depositing User : Symplectic Elements
Date Deposited : 25 Nov 2014 17:26
Last Modified : 25 Nov 2014 17:26
URI: http://epubs.surrey.ac.uk/id/eprint/806506

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