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Accurate ion beam analysis in the presence of surface roughness

Molodtsov, SL, Gurbich, AF and Jeynes, C (2008) Accurate ion beam analysis in the presence of surface roughness JOURNAL OF PHYSICS D-APPLIED PHYSICS, 41 (20), ARTN 2.

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Item Type: Article
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Ion Beam Centre
Authors :
AuthorsEmailORCID
Molodtsov, SLUNSPECIFIEDUNSPECIFIED
Gurbich, AFUNSPECIFIEDUNSPECIFIED
Jeynes, CUNSPECIFIEDUNSPECIFIED
Date : 21 October 2008
Identification Number : 10.1088/0022-3727/41/20/205303
Uncontrolled Keywords : Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, RUTHERFORD BACKSCATTERING SPECTROSCOPY, DEPTH PROFILES, THIN-FILMS, SIMULATION, ERDA, RBS, SPECTRA, SILICON
Related URLs :
Additional Information : Copyright 2008 Institute of Physics. This is the author's accepted manuscript.
Depositing User : Symplectic Elements
Date Deposited : 21 Nov 2014 13:46
Last Modified : 25 Apr 2015 13:37
URI: http://epubs.surrey.ac.uk/id/eprint/806502

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