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Temperature-Dependant Study Of Phosphorus Ion Implantation In Germanium

Razali, MA, Smith, AJ, Jeynes, C and Gwilliam, RM (2012) Temperature-Dependant Study Of Phosphorus Ion Implantation In Germanium In: 19th International Conference on Ion Implantation Technology (IIT), 2012-06-25 - 2012-06-29, Valladolid, SPAIN.

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Item Type: Conference or Workshop Item (Conference Paper)
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Ion Beam Centre
Authors :
AuthorsEmailORCID
Razali, MAUNSPECIFIEDUNSPECIFIED
Smith, AJUNSPECIFIEDUNSPECIFIED
Jeynes, CUNSPECIFIEDUNSPECIFIED
Gwilliam, RMUNSPECIFIEDUNSPECIFIED
Date : 1 January 2012
Identification Number : 10.1063/1.4766522
Contributors :
ContributionNameEmailORCID
PublisherAMER INST PHYSICS, UNSPECIFIEDUNSPECIFIED
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Physics, Applied, Engineering, Physics, Phosphorus, Ion Implantation, Damage, Germanium, High and low temperature implantation
Related URLs :
Additional Information : © 2012 American Institute of Physics 978-0-7354-1108-1
Depositing User : Symplectic Elements
Date Deposited : 18 Nov 2014 09:57
Last Modified : 18 Nov 2014 14:33
URI: http://epubs.surrey.ac.uk/id/eprint/806491

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