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The fabrication of aspherical microlenses using focused ion-beam techniques

Langridge, MT, Cox, DC, Webb, RP and Stolojan, V (2014) The fabrication of aspherical microlenses using focused ion-beam techniques MICRON, 57. pp. 56-66.

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Item Type: Article
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Authors :
AuthorsEmailORCID
Langridge, MTUNSPECIFIEDUNSPECIFIED
Cox, DCUNSPECIFIEDUNSPECIFIED
Webb, RPUNSPECIFIEDUNSPECIFIED
Stolojan, VUNSPECIFIEDUNSPECIFIED
Date : 1 February 2014
Identification Number : 10.1016/j.micron.2013.10.013
Uncontrolled Keywords : Science & Technology, Technology, Microscopy, MICROSCOPY, Aspheric micro-lenses, Micro-fabrication, Focused ion beam lithography, Chemical etching, SILICON, BOMBARDMENT, DIFFUSION, GALLIUM, SENSORS, DAMAGE
Related URLs :
Additional Information : Copyright © 2013 Elsevier Ltd. All rights reserved. NOTICE: this is the author’s version of a work that was accepted for publication in Micron. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Micron, 57, October 2013, DOI 10.1016/j.micron.2013.10.013.
Depositing User : Symplectic Elements
Date Deposited : 14 Jan 2014 16:44
Last Modified : 17 Jan 2015 14:51
URI: http://epubs.surrey.ac.uk/id/eprint/804929

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