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Sharp high-aspect-ratio AFM tips fabricated by a combination of deep reactive ion etching and focused ion beam techniques.

Caballero, D, Villanueva, G, Plaza, JA, Mills, CA, Samitier, J and Errachid, A (2010) Sharp high-aspect-ratio AFM tips fabricated by a combination of deep reactive ion etching and focused ion beam techniques. Journal of Nanoscience and Nanotechnology, 10 (1). pp. 497-501.

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Abstract

The shape and dimensions of an atomic force microscope tip are crucial factors to obtain high resolution images at the nanoscale. When measuring samples with narrow trenches, inclined sidewalls near 90 degrees or nanoscaled structures, standard silicon atomic force microscopy (AFM) tips do not provide satisfactory results. We have combined deep reactive ion etching (DRIE) and focused ion beam (FIB) lithography techniques in order to produce probes with sharp rocket-shaped silicon AFM tips for high resolution imaging. The cantilevers were shaped and the bulk micromachining was performed using the same DRIE equipment. To improve the tip aspect ratio we used FIB nanolithography technique. The tips were tested on narrow silicon trenches and over biological samples showing a better resolution when compared with standard AFM tips, which enables nanocharacterization and nanometrology of high-aspect-ratio structures and nanoscaled biological elements to be completed, and provides an alternative to commercial high aspect ratio AFM tips.

Item Type: Article
Authors :
AuthorsEmailORCID
Caballero, DUNSPECIFIEDUNSPECIFIED
Villanueva, GUNSPECIFIEDUNSPECIFIED
Plaza, JAUNSPECIFIEDUNSPECIFIED
Mills, CAUNSPECIFIEDUNSPECIFIED
Samitier, JUNSPECIFIEDUNSPECIFIED
Errachid, AUNSPECIFIEDUNSPECIFIED
Date : January 2010
Identification Number : https://doi.org/10.1166/jnn.2010.1737
Uncontrolled Keywords : Cell Line, Tumor, Humans, Microscopy, Atomic Force, Microscopy, Electron, Scanning, Nanotechnology, Osteoblasts, Polymethyl Methacrylate, Silicon
Depositing User : Symplectic Elements
Date Deposited : 28 Mar 2017 13:24
Last Modified : 28 Mar 2017 13:24
URI: http://epubs.surrey.ac.uk/id/eprint/804163

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