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The influence of an OTS self-assembled monolayer on the wear-resistant properties of polysilicon based MEMS

Baker, MA and Li, J (2006) The influence of an OTS self-assembled monolayer on the wear-resistant properties of polysilicon based MEMS In: 11th European Conference on Applications of Surface and Interface Anlaysis, 2005-09-25 - 2005-09-30, Vienna, AUSTRIA.

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Item Type: Conference or Workshop Item (Paper)
Divisions : Faculty of Engineering and Physical Sciences > Mechanical Engineering Sciences
Authors :
AuthorsEmail
Baker, MAUNSPECIFIED
Li, JUNSPECIFIED
Date : 1 April 2006
Identification Number : 10.1002/sia.2210
Contributors :
ContributionNameEmail
PublisherJOHN WILEY & SONS LTD, UNSPECIFIED
Uncontrolled Keywords : Science & Technology, Physical Sciences, Chemistry, Physical, Chemistry, CHEMISTRY, PHYSICAL, MEMS, wear, XPS, AFM, FILMS, SI
Related URLs :
Additional Information : The definitive version is available at http://dx.doi.org/10.1002/sia.2210
Depositing User : Symplectic Elements
Date Deposited : 08 Nov 2012 19:50
Last Modified : 09 Dec 2015 15:14
URI: http://epubs.surrey.ac.uk/id/eprint/7918

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