High speed silicon optical modulator with self-aligned fabrication process

Thomson, DJ, Gardes, FY, Reed, GT and Fedeli, J-M (2010) High speed silicon optical modulator with self-aligned fabrication process IEEE 7th International Conference on Group IV Photonics. 81 - 83.

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Abstract

Electronic and photonic devices formed using self-aligned processes are attractive for reducing performance variations and increasing yield. In this paper a novel high speed silicon optical modulator which has self-aligned pn junction formation is introduced.

Item Type:	Article
Additional Information:	Copyright 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Divisions:	Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Photonics
Depositing User:	Symplectic Elements
Date Deposited:	02 Feb 2012 11:51
Last Modified:	23 Sep 2013 18:52
URI:	http://epubs.surrey.ac.uk/id/eprint/7871

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