High speed silicon optical modulator with self-aligned fabrication process
Thomson, DJ, Gardes, FY, Reed, GT and Fedeli, J-M (2010) High speed silicon optical modulator with self-aligned fabrication process IEEE 7th International Conference on Group IV Photonics . 81 - 83.
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Official URL: http://dx.doi.org/10.1109/GROUP4.2010.5643421
Electronic and photonic devices formed using self-aligned processes are attractive for reducing performance variations and increasing yield. In this paper a novel high speed silicon optical modulator which has self-aligned pn junction formation is introduced.
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|Divisions:||Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Photonics|
|Deposited By:||Symplectic Elements|
|Deposited On:||02 Feb 2012 11:51|
|Last Modified:||16 Feb 2013 15:19|
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