High speed silicon optical modulator with self-aligned fabrication process
Thomson, DJ, Gardes, FY, Reed, GT and Fedeli, J-M (2010) High speed silicon optical modulator with self-aligned fabrication process IEEE 7th International Conference on Group IV Photonics. 81 - 83.
G4P 2010 DThomson.pdf - Accepted Version
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Electronic and photonic devices formed using self-aligned processes are attractive for reducing performance variations and increasing yield. In this paper a novel high speed silicon optical modulator which has self-aligned pn junction formation is introduced.
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|Divisions:||Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Photonics|
|Depositing User:||Symplectic Elements|
|Date Deposited:||02 Feb 2012 11:51|
|Last Modified:||23 Sep 2013 18:52|
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