High speed silicon optical modulator with self aligned fabrication process
Thomson, DJ, Gardes, FY, Reed, GT, Milesi, F and Fedeli, J-M (2010) High speed silicon optical modulator with self aligned fabrication process Optics Express, 18 (18). 19064 - 19069. ISSN 1094-4087
|PDF - Published Version |
Available under License : See the attached licence file.
|Plain Text (licence)|
Official URL: http://dx.doi.org/10.1364/OE.18.019064
With the imminent commercialisation of silicon photonic devices comes the requirement for a fabrication process capable of high yield and device performance repeatability. The precise alignment of the different elements of a device can be a major fabrication challenge for minimising performance variation or even device failure. In this paper a new design of high speed carrier depletion silicon optical modulator is introduced which features the use of a self-aligned fabrication process to form the pn junction. Experimental results are presented from an initial fabrication run, which has demonstrated a 6dB modulation depth at 10Gbit/s from a 3.5mm long device.
|Additional Information:||This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: <a href=http://dx.doi.org/10.1364/OE.18.019064</a>. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.|
|Divisions:||Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Photonics|
|Deposited By:||Symplectic Elements|
|Deposited On:||14 Jun 2012 11:18|
|Last Modified:||11 May 2013 14:46|
Repository Staff Only: item control page