University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Remote plasma sputtering of indium tin oxide thin films for large area flexible electronics

Yeadon, AD, Wakeham, SJ, Brown, HL, Thwaites, MJ, Whiting, MJ and Baker, MA (2011) Remote plasma sputtering of indium tin oxide thin films for large area flexible electronics Thin Solid Films, 520 (4). 1207 - 1211. ISSN 0040-6090

[img]
Preview
PDF
Remote plasma sputtering of indium tin oxide thin films for large area flexible electronics 20111106.pdf - Accepted Version
Available under License : See the attached licence file.

Download (833Kb)
[img] Plain Text (licence)
licence.txt

Download (1516b)

Abstract

Indium tin oxide (ITO) thin films with a specific resistivity of 3.5 × 10− 4 Ω cm and average visible light transmission (VLT) of 90% have been reactively sputtered onto A4 Polyethylene terephthalate (PET), glass and silicon substrates using a remote plasma sputtering system. This system offers independent control of the plasma density and the target power enabling the effect of the plasma on ITO properties to be studied. Characterization of ITO on glass and silicon has shown that increasing the plasma density gives rise to a decrease in the specific resistivity and an increase in the optical band gap of the ITO films. Samples deposited at plasma powers of 1.5 kW, 2.0 kW and 2.5 kW and optimized oxygen flow rates exhibited specific resistivity values of 3.8 × 10− 4 Ω cm, 3.7 × 10− 4 Ω cm and 3.5 × 10− 4 Ω cm and optical gaps of 3.48 eV, 3.51 eV and 3.78 eV respectively. The increase in plasma density also influenced the crystalline texture and the VLT increased from 70 to 95%, indicating that more oxygen is being incorporated into the growing film. It has been shown that the remote plasma sputter technique can be used in an in-line process to produce uniform ITO coatings on PET with specific resistivities of between 3.5 × 10− 4 and 4.5 × 10− 4 Ω cm and optical transmission of greater than 85% over substrate widths of up to 30 cm.

Item Type: Article
Additional Information: NOTICE: this is the author’s version of a work that was accepted for publication in Thin Solid Films. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Thin Solid Films, 520(4), December 2011, DOI 10.1016/j.tsf.2011.07.072.
Divisions: Faculty of Engineering and Physical Sciences > Mechanical Engineering Sciences
Depositing User: Symplectic Elements
Date Deposited: 07 Dec 2011 12:08
Last Modified: 23 Sep 2013 18:49
URI: http://epubs.surrey.ac.uk/id/eprint/7587

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year


Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800